Inventor
SCHAADT GREGORY P
US15 patents
⚠️ This page may combine multiple inventors who share the name “SCHAADT GREGORY P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
REFLECTIVITY INC
7 patentsUS6290864B1Sep 18, 2001
Fluoride gas etching of silicon with improved selectivity
REFLECTIVITY INC140 citations98
US7041224B2May 9, 2006
Method for vapor phase etching of silicon
REFLECTIVITY INC72 citations97
US6949202B1Sep 27, 2005
Apparatus and method for flow of process gas in an ultra-clean environment
REFLECTIVITY INC34 citations92
US6942811B2Sep 13, 2005
Method for achieving improved selectivity in an etching process
REFLECTIVITY INC19 citations92
US6800210B2Oct 5, 2004
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
REFLECTIVITY INC50 citations92
US7027200B2Apr 11, 2006
Etching method used in fabrications of microstructures
REFLECTIVITY INC11 citations84
US6939472B2Sep 6, 2005
Etching method in fabrications of microstructures
REFLECTIVITY INC10 citations73
PULSE BIOSCIENCES INC
5 patentsUS11766563B2Sep 26, 2023
Nanosecond pulsed power sources having multi-core transformers
PULSE BIOSCIENCES INC1 citations72
US11452870B2Sep 27, 2022
Nanosecond pulsed power sources having multi-core transformers
PULSE BIOSCIENCES INC4 citations72
US12465775B2Nov 11, 2025
Apparatuses and methods for limiting load current in nanosecond pulsed power sources
PULSE BIOSCIENCES INC0 citations62
US12447339B2Oct 21, 2025
Nanosecond pulsed power sources having multi-core transformers
PULSE BIOSCIENCES INC0 citations62
US11904164B2Feb 20, 2024
Nanosecond pulsed electric field system
PULSE BIOSCIENCES INC1 citations62
TEXAS INSTRUMENTS INC
3 patentsUS7189332B2Mar 13, 2007
Apparatus and method for detecting an endpoint in a vapor phase etch
TEXAS INSTRUMENTS INC8 citations73
US7645704B2Jan 12, 2010
Methods and apparatus of etch process control in fabrications of microstructures
TEXAS INSTRUMENTS INC3 citations62
US7655553B2Feb 2, 2010
Microstructure sealing tool and methods of using the same
TEXAS INSTRUMENTS INC0 citations51