Inventor

ICHIHARA HIRONOBU

JP3 patents

Patents

3 patents

US6382964B2May 7, 2002

Process and apparatus for heat-treating substrate having film-forming composition thereon

NORITAKE CO LTD20 citations92

US6261091B1Jul 17, 2001

Process and apparatus for heat-treating substrate having film-forming composition thereon

NORITAKE CO LTD17 citations92

US5980991ANov 9, 1999

Process for heat-treating substrate having film-forming composition thereon

NORITAKE CO LTD14 citations81