P

Inventor

ARAI HATSUYUKI

JP14 patents
⚠️ This page may combine multiple inventors who share the name “ARAI HATSUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CO LTD

10 patents
US6110026AAug 29, 2000

Carrier and polishing apparatus

SPEEDFAM CO LTD58 citations96
US5916009AJun 29, 1999

Apparatus for applying an urging force to a wafer

SPEEDFAM CO LTD70 citations95
US5099614AMar 31, 1992

Flat lapping machine with sizing mechanism

SPEEDFAM CO LTD97 citations95
US6012964AJan 11, 2000

Carrier and CMP apparatus

SPEEDFAM CO LTD73 citations93
US6074277AJun 13, 2000

Polishing apparatus

SPEEDFAM CO LTD49 citations92
US6066230AMay 23, 2000

Planarization method, workpiece measuring method, and surface planarization apparatus having a measuring device

SPEEDFAM CO LTD23 citations92
US6030488AFeb 29, 2000

Chemical and mechanical polishing apparatus

SPEEDFAM CO LTD38 citations92
US4805348AFeb 21, 1989

Flat lapping machine

SPEEDFAM CO LTD50 citations88
US6040244AMar 21, 2000

Polishing pad control method and apparatus

SPEEDFAM CO LTD48 citations87
US6068545AMay 30, 2000

Workpiece surface processing apparatus

SPEEDFAM CO LTD18 citations84

(unassigned)

1 patent
US6089966AJul 18, 2000

Surface polishing pad

68 citations94

SPEEDFAM COMPANY LIMITED

1 patent
US5605499AFeb 25, 1997

Flattening method and flattening apparatus of a semiconductor device

SPEEDFAM COMPANY LIMITED71 citations94

SPEEDFAM CORP

1 patent
US5685766ANov 11, 1997

Polishing control method

SPEEDFAM CORP55 citations91

ARAI HATSUYUKI

1 patent
US4707945ANov 24, 1987

Upper plate driving system for surface lapping machine

ARAI HATSUYUKI5 citations57