Inventor
MILLER ALAN J
US14 patents
⚠️ This page may combine multiple inventors who share the name “MILLER ALAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
11 patentsUS6218309B1Apr 17, 2001
Method of achieving top rounding and uniform etch depths while etching shallow trench isolation features
LAM RES CORP177 citations98
US6287974B1Sep 11, 2001
Method of achieving top rounding and uniform etch depths while etching shallow trench isolation features
LAM RES CORP75 citations95
US6432832B1Aug 13, 2002
Method of improving the profile angle between narrow and wide features
LAM RES CORP35 citations89
US6939811B2Sep 6, 2005
Apparatus and method for controlling etch depth
LAM RES CORP17 citations83
US7186661B2Mar 6, 2007
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP6 citations71
US7098141B1Aug 29, 2006
Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structures
LAM RES CORP7 citations70
US11112773B2Sep 7, 2021
Systems for removing and replacing consumable parts from a semiconductor process module in situ
LAM RES CORP5 citations69
US6649996B2Nov 18, 2003
In situ and ex situ hardmask process for STI with oxide collar application
LAM RES CORP5 citations69
US6225234B1May 1, 2001
In situ and ex situ hardmask process for STI with oxide collar application
LAM RES CORP6 citations69
US7682980B2Mar 23, 2010
Method to improve profile control and N/P loading in dual doped gate applications
LAM RES CORP3 citations61
US7605063B2Oct 20, 2009
Photoresist stripping chamber and methods of etching photoresist on substrates
LAM RES CORP5 citations58