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Inventor
SOESILO FANDAYANI
US
2 patents
Patents
2 patents
US6649996B2
Nov 18, 2003
In situ and ex situ hardmask process for STI with oxide collar application
LAM RES CORP
5 citations
69
US6225234B1
May 1, 2001
In situ and ex situ hardmask process for STI with oxide collar application
LAM RES CORP
6 citations
69