Inventor

MAILHO ROBERT D

US7 patents

⚠️ This page may combine multiple inventors who share the name “MAILHO ROBERT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

3 patents

US6902622B2Jun 7, 2005

Systems and methods for epitaxially depositing films on a semiconductor substrate

MATTSON TECH INC38 citations89

US6436796B1Aug 20, 2002

Systems and methods for epitaxial processing of a semiconductor substrate

MATTSON TECH INC43 citations89

US6118100ASep 12, 2000

Susceptor hold-down mechanism

MATTSON TECH INC43 citations89

(unassigned)

2 patents

US5891251AApr 6, 1999

CVD reactor having heated process chamber within isolation chamber

443 citations96

US5653808AAug 5, 1997

Gas injection system for CVD reactors

89 citations93

CONCEPT SYSTEMS DESIGN INC

2 patents

US6113984ASep 5, 2000

Gas injection system for CVD reactors

CONCEPT SYSTEMS DESIGN INC86 citations93

US6031211AFeb 29, 2000

Zone heating system with feedback control

CONCEPT SYSTEMS DESIGN INC34 citations90