Inventor
BERGER ALEX
US9 patents
⚠️ This page may combine multiple inventors who share the name “BERGER ALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS11527424B2Dec 13, 2022
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC16 citations93
US11784074B2Oct 10, 2023
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC2 citations72
US12334376B2Jun 17, 2025
Substrate transfer systems and methods of use thereof
APPLIED MATERIALS INC0 citations62
TRU SI TECHNOLOGIES INC
3 patentsUS6667242B2Dec 23, 2003
Brim and gas escape for non-contact wafer holder
TRU SI TECHNOLOGIES INC6 citations73
US6448188B1Sep 10, 2002
Method of preventing motion of article in an article holder
TRU SI TECHNOLOGIES INC2 citations62
US6398823B1Jun 4, 2002
Dynamic break for non-contact wafer holder
TRU SI TECHNOLOGIES INC4 citations62