Inventor
SU HUI CHI
TW3 patents
Patents
3 patentsUS6734074B2May 11, 2004
Micro fabrication with vortex shaped spirally topographically tapered spirally patterned conductor layer and method for fabrication thereof
IND TECH RES INST10 citations68
US12366482B2Jul 22, 2025
Infrared device and method for manufacturing the same
IND TECH RES INST0 citations56
US6579408B1Jun 17, 2003
Apparatus and method for etching wafer backside
IND TECH RES INST4 citations50