Inventor
BOUMERZOUG MOHAMED
US3 patents
Patents
3 patentsUS6764385B2Jul 20, 2004
Methods for resist stripping and cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC34 citations90
US7134941B2Nov 14, 2006
Methods for residue removal and corrosion prevention in a post-metal etch process
NANOCLEAN TECHNOLOGIES INC13 citations81
US7040961B2May 9, 2006
Methods for resist stripping and cleaning surfaces substantially free of contaminants
NANOCLEAN TECHNOLOGIES INC5 citations60