Inventor
EMAMI RAMIN
US21 patents
⚠️ This page may combine multiple inventors who share the name “EMAMI RAMIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS6413873B1Jul 2, 2002
System for chemical mechanical planarization
APPLIED MATERIALS INC85 citations97
US6299698B1Oct 9, 2001
Wafer edge scrubber and method
APPLIED MATERIALS INC75 citations96
US6676497B1Jan 13, 2004
Vibration damping in a chemical mechanical polishing system
APPLIED MATERIALS INC33 citations93
US6656842B2Dec 2, 2003
Barrier layer buffing after Cu CMP
APPLIED MATERIALS INC41 citations93
US7256111B2Aug 14, 2007
Pretreatment for electroless deposition
APPLIED MATERIALS INC40 citations92
US6786996B2Sep 7, 2004
Apparatus and method for edge bead removal
APPLIED MATERIALS INC35 citations92
US6669538B2Dec 30, 2003
Pad cleaning for a CMP system
APPLIED MATERIALS INC32 citations92
US6432826B1Aug 13, 2002
Planarized Cu cleaning for reduced defects
APPLIED MATERIALS INC35 citations92
US6322427B1Nov 27, 2001
Conditioning fixed abrasive articles
APPLIED MATERIALS INC35 citations92
US7014538B2Mar 21, 2006
Article for polishing semiconductor substrates
APPLIED MATERIALS INC27 citations90
US6857941B2Feb 22, 2005
Multi-phase polishing pad
APPLIED MATERIALS INC34 citations90
US6592439B1Jul 15, 2003
Platen for retaining polishing material
APPLIED MATERIALS INC22 citations90
US7497767B2Mar 3, 2009
Vibration damping during chemical mechanical polishing
APPLIED MATERIALS INC8 citations84
US7273813B2Sep 25, 2007
Wafer cleaning solution for cobalt electroless application
APPLIED MATERIALS INC11 citations84
US7041599B1May 9, 2006
High through-put Cu CMP with significantly reduced erosion and dishing
APPLIED MATERIALS INC14 citations84
US6708701B2Mar 23, 2004
Capillary ring
APPLIED MATERIALS INC11 citations74
US7104267B2Sep 12, 2006
Planarized copper cleaning for reduced defects
APPLIED MATERIALS INC3 citations63
US7331847B2Feb 19, 2008
Vibration damping in chemical mechanical polishing system
APPLIED MATERIALS INC0 citations52
US7014545B2Mar 21, 2006
Vibration damping in a chemical mechanical polishing system
APPLIED MATERIALS INC0 citations52
US6832948B1Dec 21, 2004
Thermal preconditioning fixed abrasive articles
APPLIED MATERIALS INC1 citations52