Inventor

KATSUMATA YOSHIFUMI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “KATSUMATA YOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

1 patent

US8025759B2Sep 27, 2011

Polishing apparatus and polishing method

EBARA CORP12 citations81

NAKAO HIDETAKA

1 patent

US8388409B2Mar 5, 2013

Substrate polishing apparatus

NAKAO HIDETAKA9 citations79

SASAKI TATSUYA

1 patent

US8398811B2Mar 19, 2013

Polishing apparatus and polishing method

SASAKI TATSUYA1 citations48