Inventor

CHEN BEEN-DER

US18 patents

⚠️ This page may combine multiple inventors who share the name “CHEN BEEN-DER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN BEEN-DER

ASML NETHERLANDS BV

Multivariable solver for optical proximity correction

Method and apparatus for cost function based simultaneous OPC and SBAR optimization

Method for determining curvilinear patterns for patterning device

Multivariable solver for optical proximity correction

Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)

Method and system for pattern configuration

Method for determining curvilinear patterns for patterning device

Method and apparatus for model based flexible MRC

Method for generating patterning device pattern at patch boundary

Method for generating patterning device pattern at patch boundary

Method for improving consistency in mask pattern generation

Method and apparatus for model based flexible MRC

WONG WILLIAM S

Local multivariable solver for optical proximity correction in lithographic processing method, and device manufactured thereby

Multivariable solver for optical proximity correction

Local multivariable solver for optical proximity correction in lithographic processing method, and device manufactured thereby

BRION TECH INC

Multivariable solver for optical proximity correction

TAO JUN

Method and apparatus for cost function based simultaneous OPC and SBAR optimization

TSAI MIN-CHUN

Method and apparatus for enhancing signal strength for improved generation and placement of model-based sub-resolution assist features (MB-SRAF)