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Inventor
YOO KYOUNG
KR
2 patents
Patents
2 patents
US8828829B2
Sep 9, 2014
Semiconductor device with air gaps and method for fabricating the same
SK HYNIX INC
18 citations
88
US8999797B2
Apr 7, 2015
Semiconductor device with air gaps and method for fabricating the same
SK HYNIX INC
6 citations
80