Inventor
TSURUTA SHIGETO
JP5 patents
Patents
5 patentsUS9238245B2Jan 19, 2016
Coating apparatus and method for filling coating liquid
TOKYO ELECTRON LTD5 citations72
US9401291B2Jul 26, 2016
Coating apparatus
TOKYO ELECTRON LTD6 citations65
US12451374B2Oct 21, 2025
Bonding system and inspection method of inspecting combined substrate
TOKYO ELECTRON LTD0 citations55
US11791182B2Oct 17, 2023
Measuring method and measuring device
TOKYO ELECTRON LTD0 citations43
US9649655B2May 16, 2017
Coating apparatus and liquid surface detecting method
TOKYO ELECTRON LTD0 citations27