Inventor
OH JANG SEOK
US8 patents
Patents
8 patentsUS7204888B2Apr 17, 2007
Lift pin assembly for substrate processing
APPLIED MATERIALS INC22 citations89
US11837448B2Dec 5, 2023
High-temperature chamber and chamber component cleaning and maintenance method and apparatus
APPLIED MATERIALS INC0 citations61
US10208380B2Feb 19, 2019
Advanced coating method and materials to prevent HDP-CVD chamber arcing
APPLIED MATERIALS INC1 citations60
US10883932B2Jan 5, 2021
Advanced in-situ particle detection system for semiconductor substrate processing systems
APPLIED MATERIALS INC0 citations57
US10655223B2May 19, 2020
Advanced coating method and materials to prevent HDP-CVD chamber arcing
APPLIED MATERIALS INC0 citations50
US10002745B2Jun 19, 2018
Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber
APPLIED MATERIALS INC1 citations50
US12068180B2Aug 20, 2024
Advanced temperature monitoring system and methods for semiconductor manufacture productivity
APPLIED MATERIALS INC0 citations48
US10365216B2Jul 30, 2019
Advanced in-situ particle detection system for semiconductor substrate processing systems
APPLIED MATERIALS INC0 citations46