Inventor
CALADO VICTOR EMANUEL
NL8 patents
Patents
8 patentsUS11187995B2Nov 30, 2021
Metrology using a plurality of metrology target measurement recipes
ASML NETHERLANDS BV2 citations72
US10162272B2Dec 25, 2018
Metrology method and apparatus, substrates for use in such methods, lithographic system and device manufacturing method
ASML NETHERLANDS BV2 citations72
US12276921B2Apr 15, 2025
Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method
ASML NETHERLANDS BV2 citations71
US10474045B2Nov 12, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations71
US11320750B2May 3, 2022
Determining an optimal operational parameter setting of a metrology system
ASML NETHERLANDS BV0 citations61
US10788761B2Sep 29, 2020
Determining an optimal operational parameter setting of a metrology system
ASML NETHERLANDS BV1 citations61
US11300887B2Apr 12, 2022
Method to change an etch parameter
ASML NETHERLANDS BV0 citations49
US10474043B2Nov 12, 2019
Method of measuring a property of a substrate, inspection apparatus, lithographic system and device manufacturing method
ASML NETHERLANDS BV0 citations39