Inventor
KIYOHARA YASUO
JP5 patents
Patents
5 patentsUS10067514B2Sep 4, 2018
Substrate processing apparatus and liquid mixing method
TOKYO ELECTRON LTD4 citations69
US10796897B2Oct 6, 2020
Supercritical fluid producing apparatus and substrate processing apparatus
TOKYO ELECTRON LTD3 citations68
US10593571B2Mar 17, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations68
US11735439B2Aug 22, 2023
Substrate processing system and method for supplying processing fluid
TOKYO ELECTRON LTD0 citations60
US11482427B2Oct 25, 2022
Substrate processing system and method for supplying processing fluid
TOKYO ELECTRON LTD1 citations60