Inventor
MUKHERJEE SHAUNAK
US9 patents
Patents
9 patentsUS9508545B2Nov 29, 2016
Selectively lateral growth of silicon oxide thin film
APPLIED MATERIALS INC6 citations83
US9741558B2Aug 22, 2017
Selectively lateral growth of silicon oxide thin film
APPLIED MATERIALS INC3 citations72
US11289369B2Mar 29, 2022
Low-k dielectric with self-forming barrier layer
APPLIED MATERIALS INC0 citations62
US11011371B2May 18, 2021
SiBN film for conformal hermetic dielectric encapsulation without direct RF exposure to underlying structure material
APPLIED MATERIALS INC0 citations61
US11393678B2Jul 19, 2022
Low-k dielectric films
APPLIED MATERIALS INC0 citations60
US12198925B2Jan 14, 2025
Systems and methods for depositing low-k dielectric films
APPLIED MATERIALS INC0 citations57
US11594409B2Feb 28, 2023
Systems and methods for depositing low-k dielectric films
APPLIED MATERIALS INC1 citations57
US10002757B2Jun 19, 2018
Selectively lateral growth of silicon oxide thin film
APPLIED MATERIALS INC0 citations51
US10790140B2Sep 29, 2020
High deposition rate and high quality nitride
APPLIED MATERIALS INC0 citations41