Inventor
RAJEEV RAHUL
US4 patents
Patents
4 patentsUS12198925B2Jan 14, 2025
Systems and methods for depositing low-k dielectric films
APPLIED MATERIALS INC0 citations57
US11594409B2Feb 28, 2023
Systems and methods for depositing low-k dielectric films
APPLIED MATERIALS INC1 citations57
US12057325B2Aug 6, 2024
Gasbox for semiconductor processing chamber
APPLIED MATERIALS INC0 citations53
US11694908B2Jul 4, 2023
Gasbox for semiconductor processing chamber
APPLIED MATERIALS INC1 citations53