Inventor
JOHNSON RANDALL E
US19 patents
⚠️ This page may combine multiple inventors who share the name “JOHNSON RANDALL E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
8 patentsUS5025306AJun 18, 1991
Assembly of semiconductor chips
TEXAS INSTRUMENTS INC157 citations96
US5327327AJul 5, 1994
Three dimensional assembly of integrated circuit chips
TEXAS INSTRUMENTS INC93 citations91
US4659413AApr 21, 1987
Automated single slice cassette load lock plasma reactor
TEXAS INSTRUMENTS INC31 citations91
US4891087AJan 2, 1990
Isolation substrate ring for plasma reactor
TEXAS INSTRUMENTS INC39 citations89
US4657621AApr 14, 1987
Low particulate vacuum chamber input/output valve
TEXAS INSTRUMENTS INC28 citations84
US4654106AMar 31, 1987
Automated plasma reactor
TEXAS INSTRUMENTS INC20 citations82
US4657617AApr 14, 1987
Anodized aluminum substrate for plasma etch reactor
TEXAS INSTRUMENTS INC18 citations74
US4657618AApr 14, 1987
Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate
TEXAS INSTRUMENTS INC19 citations70