Inventor

DAWSON KEITH E

US4 patents

⚠️ This page may combine multiple inventors who share the name “DAWSON KEITH E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

2 patents

US5609720AMar 11, 1997

Thermal control of semiconductor wafer during reactive ion etching

LAM RES CORP90 citations94

US6536777B2Mar 25, 2003

Sealing techniques suitable for different geometries and constrained spaces

LAM RES CORP2 citations60

DAWSON KEITH E

2 patents

US8317450B2Nov 27, 2012

Tactile wafer lifter and methods for operating the same

DAWSON KEITH E2 citations56

US8657556B2Feb 25, 2014

Tactile wafer lifter and methods for operating the same

DAWSON KEITH E0 citations45