Inventor
SILLMON ROGER
US3 patents
Patents
3 patentsUS6716289B1Apr 6, 2004
Rigid gas collector for providing an even flow of gasses
ITT MFG ENTERPRISES INC22 citations89
US6676758B2Jan 13, 2004
Gas collector for epitaxial reactor
ITT MFG ENTERPRISES INC20 citations89
US6666920B1Dec 23, 2003
Gas collector for providing an even flow of gasses through a reaction chamber of an epitaxial reactor
ITT MFG ENTERPRISES INC26 citations89