Inventor

HORNIG STEFFEN

DE3 patents

⚠️ This page may combine multiple inventors who share the name “HORNIG STEFFEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

1 patent

US6797029B2Sep 28, 2004

Process facility having at least two physical units each having a reduced density of contaminating particles with respect to the surroundings

INFINEON TECHNOLOGIES AG16 citations78

FURUSHO TOSHINOBU

1 patent

US9086190B2Jul 21, 2015

Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus

FURUSHO TOSHINOBU2 citations58

TOKYO ELECTRON LTD

1 patent

US10035173B2Jul 31, 2018

Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatus

TOKYO ELECTRON LTD0 citations50