Inventor
BARILE CONRAD A
US5 patents
Patents
5 patentsUS6972209B2Dec 6, 2005
Stacked via-stud with improved reliability in copper metallurgy
IBM32 citations90
US4243435AJan 6, 1981
Bipolar transistor fabrication process with an ion implanted emitter
IBM36 citations88
US4060427ANov 29, 1977
Method of forming an integrated circuit region through the combination of ion implantation and diffusion steps
IBM23 citations75
US7138714B2Nov 21, 2006
Via barrier layers continuous with metal line barrier layers at notched or dielectric mesa portions in metal lines
IBM10 citations73
US8053257B2Nov 8, 2011
Method for prediction of premature dielectric breakdown in a semiconductor
IBM5 citations62