Inventor
VAN ITALLIE JOHN F
US3 patents
Patents
3 patentsUS6423609B1Jul 23, 2002
Methods of forming capacitors on a wafer, photolithographic methods of forming capacitors on a wafer, and semiconductor wafer
MICRON TECHNOLOGY INC9 citations66
US7144690B2Dec 5, 2006
Photolithographic methods of using a single reticle to form overlapping patterns
MICRON TECHNOLOGY INC4 citations59
US6670109B2Dec 30, 2003
Photolithographic methods of using a single reticle to form overlapping patterns
MICRON TECHNOLOGY INC1 citations48