Inventor
BRULAND KELLY J
US21 patents
⚠️ This page may combine multiple inventors who share the name “BRULAND KELLY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ELECTRO SCIENT IND INC
14 patentsUS7687740B2Mar 30, 2010
Semiconductor structure processing using multiple laterally spaced laser beam spots delivering multiple blows
ELECTRO SCIENT IND INC145 citations98
US7425471B2Sep 16, 2008
Semiconductor structure processing using multiple laser beam spots spaced on-axis with cross-axis offset
ELECTRO SCIENT IND INC49 citations95
US7935941B2May 3, 2011
Semiconductor structure processing using multiple laser beam spots spaced on-axis on non-adjacent structures
ELECTRO SCIENT IND INC22 citations92
US7629234B2Dec 8, 2009
Semiconductor structure processing using multiple laterally spaced laser beam spots with joint velocity profiling
ELECTRO SCIENT IND INC31 citations92
US7297972B2Nov 20, 2007
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
ELECTRO SCIENT IND INC17 citations92
US7964819B2Jun 21, 2011
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as a metrology target
ELECTRO SCIENT IND INC14 citations84
US7633034B2Dec 15, 2009
Semiconductor structure processing using multiple laser beam spots overlapping lengthwise on a structure
ELECTRO SCIENT IND INC17 citations84
US7315038B2Jan 1, 2008
Methods and systems for positioning a laser beam spot relative to a semiconductor integrated circuit using a processing target as an alignment target
ELECTRO SCIENT IND INC12 citations84
US8383982B2Feb 26, 2013
Methods and systems for semiconductor structure processing using multiple laser beam spots
ELECTRO SCIENT IND INC14 citations83
US8026158B2Sep 27, 2011
Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window
ELECTRO SCIENT IND INC14 citations83
US7982160B2Jul 19, 2011
Photonic clock stabilized laser comb processing
ELECTRO SCIENT IND INC8 citations82
US7923306B2Apr 12, 2011
Semiconductor structure processing using multiple laser beam spots
ELECTRO SCIENT IND INC6 citations73
US8049135B2Nov 1, 2011
Systems and methods for alignment of laser beam(s) for semiconductor link processing
ELECTRO SCIENT IND INC4 citations62
US8358671B2Jan 22, 2013
Photonic clock stabilized laser comb processing
ELECTRO SCIENT IND INC1 citations50
BAIRD BRIAN W
2 patentsBRULAND KELLY J
2 patentsUS8148211B2Apr 3, 2012
Semiconductor structure processing using multiple laser beam spots spaced on-axis delivered simultaneously
BRULAND KELLY J11 citations81
US8076605B2Dec 13, 2011
Systems and methods for adapting parameters to increase throughput during laser-based wafer processing
BRULAND KELLY J9 citations76