Inventor
KOSHELEV KONSTANTIN NIKOLAEVIT
RU13 patents
Patents
13 patentsUS6614505B2Sep 2, 2003
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV99 citations97
US7061574B2Jun 13, 2006
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations84
US7528395B2May 5, 2009
Radiation source, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations80
US6933510B2Aug 23, 2005
Radiation source, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV16 citations79
US7501642B2Mar 10, 2009
Radiation source
ASML NETHERLANDS BV7 citations73
US7135692B2Nov 14, 2006
Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
ASML NETHERLANDS BV8 citations73
US6862075B2Mar 1, 2005
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
ASML NETHERLANDS BV8 citations73
US6818912B2Nov 16, 2004
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations71
US6667484B2Dec 23, 2003
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations71
US7208746B2Apr 24, 2007
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations68
US7462851B2Dec 9, 2008
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations61
US7279690B2Oct 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7335900B2Feb 26, 2008
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV0 citations49