Inventor
KOROB EVGENII DMITREEVITCH
RU3 patents
Patents
3 patentsUS7208746B2Apr 24, 2007
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations68
US8018574B2Sep 13, 2011
Lithographic apparatus, radiation system and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7335900B2Feb 26, 2008
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV0 citations49