Inventor
ZUKAVISHVILI GIVI GEORGIEVITCH
RU9 patents
Patents
9 patentsUS7251012B2Jul 31, 2007
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
ASML NETHERLANDS BV25 citations91
US6933510B2Aug 23, 2005
Radiation source, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV16 citations79
US6818912B2Nov 16, 2004
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations71
US6667484B2Dec 23, 2003
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations71
US7208746B2Apr 24, 2007
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations68
US8018574B2Sep 13, 2011
Lithographic apparatus, radiation system and device manufacturing method
ASML NETHERLANDS BV2 citations60
USRE41362EJun 1, 2010
Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV3 citations60
US7279690B2Oct 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7335900B2Feb 26, 2008
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV0 citations49