Inventor
GAYAZOV ROBERT RAFILEVITCH
RU5 patents
Patents
5 patentsUS7528395B2May 5, 2009
Radiation source, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations80
US7208746B2Apr 24, 2007
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations68
US7462851B2Dec 9, 2008
Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations61
US8018574B2Sep 13, 2011
Lithographic apparatus, radiation system and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7335900B2Feb 26, 2008
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV0 citations49