Inventor
AMIKURA MANABU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “AMIKURA MANABU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS7718930B2May 18, 2010
Loading table and heat treating apparatus having the loading table
TOKYO ELECTRON LTD380 citations97
US7931749B2Apr 26, 2011
Shower head and film-forming device using the same
TOKYO ELECTRON LTD30 citations91
US7651584B2Jan 26, 2010
Processing apparatus
TOKYO ELECTRON LTD10 citations81
US10094019B2Oct 9, 2018
Film forming apparatus
TOKYO ELECTRON LTD4 citations71
US10526702B2Jan 7, 2020
Film forming apparatus
TOKYO ELECTRON LTD0 citations50
US10096495B2Oct 9, 2018
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations35