Inventor
OTA HIROHISA
JP17 patents
⚠️ This page may combine multiple inventors who share the name “OTA HIROHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
13 patentsUS7815424B2Oct 19, 2010
Imprinting machine and device manufacturing method
CANON KK20 citations92
US7180575B2Feb 20, 2007
Exposure apparatus and device manufacturing method
CANON KK20 citations92
US7815425B2Oct 19, 2010
Processing apparatus
CANON KK8 citations84
US7807065B2Oct 5, 2010
Processing method
CANON KK8 citations84
US7789647B2Sep 7, 2010
Processing apparatus and method
CANON KK9 citations84
US7381272B2Jun 3, 2008
Processing apparatus
CANON KK14 citations84
US10965201B2Mar 30, 2021
Transport system, processing system and manufacturing method of article
CANON KK7 citations80
US7846346B1Dec 7, 2010
Processing apparatus and method
CANON KK4 citations63
US7690912B2Apr 6, 2010
Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
CANON KK5 citations63
US7236231B2Jun 26, 2007
Exposure apparatus and device manufacturing method
CANON KK2 citations63
US7233383B2Jun 19, 2007
Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration
CANON KK5 citations63
US7196321B2Mar 27, 2007
Fine pattern forming apparatus and fine pattern inspecting apparatus
CANON KK6 citations63
US11929655B2Mar 12, 2024
Transport system and processing system
CANON KK0 citations59