Inventor
KOBAYASHI SENSHO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “KOBAYASHI SENSHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS5788747AAug 4, 1998
Exhaust system for film forming apparatus
TOKYO ELECTRON LTD34 citations90
US10229847B2Mar 12, 2019
Substrate transfer chamber and container connecting mechanism with lid opening mechanisms
TOKYO ELECTRON LTD2 citations72
US9810905B2Nov 7, 2017
Support information display method, maintenance support method of substrate processing apparatus, support information display control apparatus, substrate processing system and recording medium
TOKYO ELECTRON LTD0 citations36