Inventor

FELDERMANN HORST

DE5 patents

⚠️ This page may combine multiple inventors who share the name “FELDERMANN HORST”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US10642167B2May 5, 2020

Optical element

ZEISS CARL SMT GMBH4 citations70

US11099308B2Aug 24, 2021

Reflective optical element

ZEISS CARL SMT GMBH0 citations41

ZEISS CARL LASER OPTICS GMBH

2 patents

US9297936B2Mar 29, 2016

Mirror with dielectric coating

ZEISS CARL LASER OPTICS GMBH3 citations70

US9933711B2Apr 3, 2018

Optical element

ZEISS CARL LASER OPTICS GMBH5 citations69

PAZIDIS ALEXANDRA

1 patent

US8488103B2Jul 16, 2013

Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same

PAZIDIS ALEXANDRA3 citations60