Inventor
SHIU YI-FAM
TW21 patents
Patents
21 patentsUS11222802B1Jan 11, 2022
Multiple semiconductor die container load port
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US11459190B2Oct 4, 2022
Systems and methods for die transfer
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10822181B2Nov 3, 2020
Systems and methods for die transfer
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US11803129B2Oct 31, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US12283506B2Apr 22, 2025
Humidity control device for equipment front end module of semiconductor processing or characterization tool
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations63
US12519006B2Jan 6, 2026
Wafer lift pin system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12261069B2Mar 25, 2025
Multiple semiconductor die container load port
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12142507B2Nov 12, 2024
Systems and methods for air flow optimization in environment for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12119251B2Oct 15, 2024
Multiple semiconductor die container load port
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11972971B2Apr 30, 2024
Wafer lift pin system
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11923225B2Mar 5, 2024
Processing arrangement and method for adjusting gas flow
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11735455B2Aug 22, 2023
Systems, devices, and methods for air flow optimization including adjacent a FOUP
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12406869B2Sep 2, 2025
Systems and methods for humidity control of FOUP during semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12051609B2Jul 30, 2024
Systems and methods for humidity control of FOUP during semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11820607B2Nov 21, 2023
Systems and methods for die transfer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12164235B2Dec 10, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11813649B2Nov 14, 2023
Semiconductor arrangement and method for making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11786947B2Oct 17, 2023
Semiconductor arrangement and method for making
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12083648B2Sep 10, 2024
Sandpaper replacement system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12272573B2Apr 8, 2025
Load port and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US11705358B2Jul 18, 2023
Systems and methods for automated processing ports
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49