P

Inventor

TONOMURA AKIRA

JP10 patents
⚠️ This page may combine multiple inventors who share the name “TONOMURA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

8 patents
US5814815ASep 29, 1998

Phase-contrast electron microscope and phase plate therefor

HITACHI LTD84 citations95
US4935625AJun 19, 1990

Electron holography apparatus

HITACHI LTD46 citations92
US4748132AMay 31, 1988

Micro fabrication process for semiconductor structure using coherent electron beams

HITACHI LTD31 citations92
US4998788AMar 12, 1991

Reflection electron holography apparatus

HITACHI LTD41 citations91
US4532422AJul 30, 1985

Electron holography microscope

HITACHI LTD29 citations91
US5192867AMar 9, 1993

Electron optical measurement apparatus

HITACHI LTD33 citations90
US4945247AJul 31, 1990

Field emission electron gun system

HITACHI LTD15 citations73
US4642461AFeb 10, 1987

Field emission type electron microscope using a multi-stage acceleration tube

HITACHI LTD10 citations71

JAPAN RES DEV CORP

2 patents
US5426521AJun 20, 1995

Aberration correction method and aberration correction apparatus

JAPAN RES DEV CORP133 citations94
US5446589AAug 29, 1995

Interference device and method for observing phase informalities

JAPAN RES DEV CORP3 citations56