Inventor

SUGINO RINSHI

JP3 patents

Patents

3 patents

US5221423AJun 22, 1993

Process for cleaning surface of semiconductor substrate

FUJITSU LTD80 citations94

US5225355AJul 6, 1993

Gettering treatment process

FUJITSU LTD91 citations93

US5178721AJan 12, 1993

Process and apparatus for dry cleaning by photo-excited radicals

FUJITSU LTD24 citations88