Inventor
LEE TUNG-LI
TW6 patents
⚠️ This page may combine multiple inventors who share the name “LEE TUNG-LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS6678581B2Jan 13, 2004
Method of calibrating a wafer edge gripping end effector
TAIWAN SEMICONDUCTOR MFG50 citations87
US6646752B2Nov 11, 2003
Method and apparatus for measuring thickness of a thin oxide layer
TAIWAN SEMICONDUCTOR MFG34 citations85
US5951196ASep 14, 1999
Frictional mount for engaging a monitor in a process chamber and method of using
TAIWAN SEMICONDUCTOR MFG6 citations53
US7518129B2Apr 14, 2009
Preventing dosage drift with duplicate dose integrators
TAIWAN SEMICONDUCTOR MFG0 citations48
US7446056B2Nov 4, 2008
Method for increasing polysilicon grain size
TAIWAN SEMICONDUCTOR MFG1 citations46