Inventor
CHEN BU-FANG
TW3 patents
⚠️ This page may combine multiple inventors who share the name “CHEN BU-FANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
2 patentsUS6541339B1Apr 1, 2003
Nitride deposition wafer to wafer native oxide uniformity improvement for 0.35 flash erase performance by adding thermal oxide oxidation process
TAIWAN SEMICONDUCTOR MFG8 citations69
US6461979B1Oct 8, 2002
LPCVD furnace uniformity improvement by temperature ramp down deposition system
TAIWAN SEMICONDUCTOR MFG8 citations65