Inventor
SUEMASA TOMOKI
JP6 patents
Patents
6 patentsUS6642149B2Nov 4, 2003
Plasma processing method
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US6089181AJul 18, 2000
Plasma processing apparatus
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US6670276B1Dec 30, 2003
Plasma processing method
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US9384993B2Jul 5, 2016
Oxide etching method
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US7326650B2Feb 5, 2008
Method of etching dual damascene structure
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US9418866B2Aug 16, 2016
Gas treatment method
TOKYO ELECTRON LTD0 citations39