Inventor

MOREAU WAYNE

US5 patents

⚠️ This page may combine multiple inventors who share the name “MOREAU WAYNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

4 patents

US7270931B2Sep 18, 2007

Silicon-containing compositions for spin-on ARC/hardmask materials

IBM15 citations90

US5547812AAug 20, 1996

Composition for eliminating microbridging in chemically amplified photoresists comprising a polymer blend of a poly(hydroxystyrene) and a copolymer made of hydroxystyrene and an acrylic monomer

IBM24 citations86

US7276327B2Oct 2, 2007

Silicon-containing compositions for spin-on arc/hardmask materials

IBM2 citations59

US7314700B2Jan 1, 2008

High sensitivity resist compositions for electron-based lithography

IBM1 citations51

SIEMENS AKTIENESELLSCHAFT

1 patent

US6107177AAug 22, 2000

Silylation method for reducing critical dimension loss and resist loss

SIEMENS AKTIENESELLSCHAFT47 citations90