Inventor
HORIGUCHI KATSUMI
JP4 patents
Patents
4 patentsUS7678225B2Mar 16, 2010
Focus ring for semiconductor treatment and plasma treatment device
TOKYO ELECTRON LTD21 citations89
US7109123B2Sep 19, 2006
Silicon etching method
TOKYO ELECTRON LTD3 citations60
US7767055B2Aug 3, 2010
Capacitive coupling plasma processing apparatus
TOKYO ELECTRON LTD5 citations59
US7416676B2Aug 26, 2008
Plasma etching method and apparatus, control program for performing the etching method, and storage medium storing the control program
TOKYO ELECTRON LTD6 citations58