Inventor

SCHWEKENDIEK HOLGER

DE2 patents

⚠️ This page may combine multiple inventors who share the name “SCHWEKENDIEK HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

URBAN ALEXANDER

1 patent

US8532364B2Sep 10, 2013

Apparatus and method for detecting defects in wafer manufacturing

URBAN ALEXANDER9 citations77

TEXAS INSTRUMENTS INC

1 patent

US7423729B2Sep 9, 2008

Method of monitoring the light integrator of a photolithography system

TEXAS INSTRUMENTS INC1 citations43