Inventor

VAN DE WAL MARINUS MARIA JOHANNES

NL5 patents

⚠️ This page may combine multiple inventors who share the name “VAN DE WAL MARINUS MARIA JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US10095123B2Oct 9, 2018

Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control program

ASML NETHERLANDS BV0 citations47

US9383659B2Jul 5, 2016

Positioning system, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV0 citations46

US9715182B2Jul 25, 2017

Lithographic apparatus, substrate support system, device manufacturing method and control program

ASML NETHERLANDS BV1 citations45

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS

1 patent

US9141004B2Sep 22, 2015

Lithographic apparatus and method

VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS2 citations58

KAMIDI RAMIDIN IZAIR

1 patent

US8854607B2Oct 7, 2014

Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method

KAMIDI RAMIDIN IZAIR1 citations45