Inventor
Guenther Daniela
DE2 patents
Patents
2 patentsUS10199274B2Feb 5, 2019
Electrically conductive via(s) in a semiconductor substrate and associated production method
X FAB SEMICONDUCTOR FOUNDRIES GMBH1 citations54
US10825728B2Nov 3, 2020
Electrically conductive via(s) in a semiconductor substrate and associated production method
X FAB SEMICONDUCTOR FOUNDRIES GMBH0 citations43