Inventor

REIF L RAFAEL

US6 patents

Patents

6 patents

US4579609AApr 1, 1986

Growth of epitaxial films by chemical vapor deposition utilizing a surface cleaning step immediately before deposition

MASSACHUSETTS INST TECHNOLOGY145 citations96

US5028977AJul 2, 1991

Merged bipolar and insulated gate transistors

MASSACHUSETTS INST TECHNOLOGY146 citations94

US4957777ASep 18, 1990

Very low pressure chemical vapor deposition process for deposition of titanium silicide films

MASSACHUSETTS INST TECHNOLOGY85 citations94

US4659401AApr 21, 1987

Growth of epitaxial films by plasma enchanced chemical vapor deposition (PE-CVD)

MASSACHUSETTS INST TECHNOLOGY39 citations91

US4668530AMay 26, 1987

Low pressure chemical vapor deposition of refractory metal silicides

MASSACHUSETTS INST TECHNOLOGY27 citations90

US4773355ASep 27, 1988

Growth of epitaxial films by chemical vapor deposition

MASSACHUSETTS INST TECHNOLOGY24 citations81