Inventor

COLEY SUZANNE M

US24 patents

⚠️ This page may combine multiple inventors who share the name “COLEY SUZANNE M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

COLEY SUZANNE M

ROHM & HAAS ELECT MAT

Photoresist composition and associated method of forming an electronic device

Photoresist composition and associated method of forming an electronic device

Aromatic resins for underlayers

Silicon-containing underlayers

Polymer comprising repeat units with photoacid-generating functionality and base-solubility-enhancing functionality, and associated photoresist composition and electronic device forming method

Aromatic resins for underlayers

Aromatic underlayer

Aromatic underlayer

Coating compositions and methods of forming electronic devices

Silicon-containing underlayers

Polymer comprising repeat units with photoacid-generating functionality and base-solubility-enhancing functionality, and associated photoresist composition and electronic device forming method

Silicon-containing underlayers

Method using silicon-containing underlayers

Silicon-containing underlayers

Coating composition for photoresist underlayer

Silicon-based hardmask

Silicon-based hardmask

SHIPLEY CO LLC

Resin purification process

Resin purification process

THACKERAY JAMES W

Photoacid generators

Polymerizable photoacid generators

COLEY SUZANNE M

Method of preparing photoacid generating monomer

Photoacid generating monomer and precursor thereof

DUPONT ELECTRONIC MAT INTERNATIONAL LLC

Underlayer compositions and patterning methods