Inventor
KAITZ JOSHUA A
US4 patents
Patents
4 patentsUS10790146B2Sep 29, 2020
Aromatic resins for underlayers
ROHM & HAAS ELECT MAT3 citations71
US11175581B2Nov 16, 2021
Aromatic resins for underlayers
ROHM & HAAS ELECT MAT0 citations61
US10133179B2Nov 20, 2018
Pattern treatment methods
ROHM & HAAS ELECT MAT1 citations51
US12234369B2Feb 25, 2025
Photoresist topcoat compositions and methods of processing photoresist compositions
ROHM & HAAS ELECT MAT0 citations49