Inventor
HUDERI SOMANNA DINKESH
US5 patents
⚠️ This page may combine multiple inventors who share the name “HUDERI SOMANNA DINKESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS11469080B1Oct 11, 2022
Magnetron assembly having coolant guide for enhanced target cooling
APPLIED MATERIALS INC0 citations60
US11056372B2Jul 6, 2021
Low temperature biasable substrate support
APPLIED MATERIALS INC0 citations58
US12183559B2Dec 31, 2024
Apparatus for temperature control in a substrate processing chamber
APPLIED MATERIALS INC0 citations49
US11981989B2May 14, 2024
Automated temperature controlled substrate support
APPLIED MATERIALS INC0 citations46