Inventor
WATAKABE YAICHIRO
JP17 patents
⚠️ This page may combine multiple inventors who share the name “WATAKABE YAICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
12 patentsUS4722878AFeb 2, 1988
Photomask material
MITSUBISHI ELECTRIC CORP74 citations94
US5322748AJun 21, 1994
Photomask and a method of manufacturing thereof comprising trapezoidal shaped light blockers covered by a transparent layer
MITSUBISHI ELECTRIC CORP22 citations92
US5266424ANov 30, 1993
Method of forming pattern and method of manufacturing photomask using such method
MITSUBISHI ELECTRIC CORP24 citations92
US4876164AOct 24, 1989
Process for manufacturing a photomask
MITSUBISHI ELECTRIC CORP16 citations82
US4873163AOct 10, 1989
Photomask material
MITSUBISHI ELECTRIC CORP21 citations82
US4985319AJan 15, 1991
Process for manufacturing a photomask
MITSUBISHI ELECTRIC CORP10 citations73
US4957834ASep 18, 1990
Method for manufacturing photomask
MITSUBISHI ELECTRIC CORP12 citations73
US4792461ADec 20, 1988
Method of forming a photomask material
MITSUBISHI ELECTRIC CORP9 citations73
US4783371ANov 8, 1988
Photomask material
MITSUBISHI ELECTRIC CORP9 citations73
US4717625AJan 5, 1988
Photomask material
MITSUBISHI ELECTRIC CORP12 citations73
US4678714AJul 7, 1987
Photomask material
MITSUBISHI ELECTRIC CORP8 citations73
US4170502AOct 9, 1979
Method of manufacturing a gate turn-off thyristor
MITSUBISHI ELECTRIC CORP18 citations73
ULVAC COATING CORP
5 patentsUS5691090ANov 25, 1997
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
ULVAC COATING CORP38 citations96
US5474864ADec 12, 1995
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
ULVAC COATING CORP99 citations96
US5830607ANov 3, 1998
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
ULVAC COATING CORP46 citations95
US5629114AMay 13, 1997
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent region
ULVAC COATING CORP37 citations92
US5674647AOct 7, 1997
Phase shift mask and manufacturing method thereof and exposure method using phase shift mask
ULVAC COATING CORP33 citations91